FabVision Data Management System for Wafer Manufacturing

A process excursion is detected by a metrology system in the Fab in Asia. A real-time notification is sent simultaneously to the Senior Process Engineer in Europe and to the Asian Fab Manager.
By reviewing the same data on his screen in Europe that the Fab Manager is reviewing at his desk, the team determines the likely cause, and corrects the problem. They generate a report of the incident, with before and after data, and send it to the Corporate Headquarters in California.
Quality Assurance in California reviews the resulting trend data, and compares data from several generations of metrology platforms in different locations. From the data, the department determines that a procedural adjustment enterprise-wide will prevent similar occurances elsewhere. Management alters their forecasts to match the anticipated improvements in yield.
Months later, the Customer Service department in Tokyo reassures the customer in Japan by generating a report from the fab in Asia and forwarding the individual wafer metrology data to the customer.

Now, with FabVision, Wafer Manufacturers have the management tools to monitor their process enterprise-wide, to store and retrieve data from the array of industry-standard tools that ADE offers them -- even months later.

Enabling data retention from numerous and diverse tools, FabVision permits offline analysis and reporting to be distributed throughout the company. A distinct step forward for manufacturing management, Fabvision is a bridge between the cleanroom and the engineer's office, and from fab management to enterprise management.

Product Highlights:

Stores metrology and inspection data from ADE Metrology Products fab-wide
Allows offline analysis of archived or current data
Monitor cleanroom process from the desktop
Centralizes data storage
Distributes data and reporting enterprise-wide
Gives Management a view into production trending
Receive real-time reporting and excursion alarms at any desktop
Generate reports on-demand from historical data
Facilitates standardization of procedures and processes
Reduces need for on-site oversight

Turnkey installation

FabVision's workstations

FabVision is more than a software package, it is a complete intranet of communication, buffering, workstation processors and storage hardware with server software and analysis applications for preserving, sorting and presenting data from diverse process monitoring tools.

FabVision can be purchased in several configurations, to accommodate varying needs for extensibility, storage or expansion.

Tool Cross-Compatibility

Since ADE has been a leading supplier of metrology for decades, our customers have numerous versions and generations of equipment under their roofs. FabVision unifies the data from our many industry-standard tools, both old and new, permitting compatibility of data review never before available.

FabVision is compatible with these common ADE metrology systems:

FabVision's gallery menu screen previews data

Some of FabVision's plotting options

Chart your data from the archive or build automated reports

Data Review

Did you ever wish you could go back and display that one wafer from last Fall, because there was this feature that you want to see again? FabVision will do that, and give you a 'gallery' preview of the other wafers related to it to choose from.

After you've retrieved the wafer from the storage drives, you can plot it, or chart it using FabVision's built-in plotting and data-comparison features.

Sales and Customer Service departments will be able to present data that confirm your credibility, and verify the quality and condition of delivered materials with customers and prospects. Even long after the events.

Monitor your process

FabVision's real-time monitoring sends reporting from the in-production measurement tool into data files, and can send alarms of process excursions in e-mails to designated recipients.

So your process engineer in Europe can be notified at the same time as the Fab Manager in Asia.

Uniform reports -- on time

With the built-in reporting features and internet connectivity, Reject and Accept reports can be automatically compiled by the server in each fab, and forwarded to your organization on schedule -- or printed automatically, or archived. You'll be able to easily standardize your data presentation, and compare "apples to apples."

Configuring your data flow

It's as easy as making a drag-and-drop flowchart. Query and filter data, generate reports, print them, mail them, or save them.

Improve your process -- everywhere

By providing global access to data, your most experienced, talented troubleshooters will be able to remotely problem-solve, reviewing diagnostic data from any location almost instantly. Then, having improved yield and efficiency in one location, you will be better able to broadcast the process update enterprise-wide. With the resulting reports after the implementation of the change, the engineer will be able to verify correct implementation without a followup visit to the site. Using FabVision, you can save time, travel (or shipping) expenses and increase the productivity of your intellectual resources at the same time.

FabVision

Data Management System for Wafer Manufacturing

Imagine: